Browse Prior Art Database

Hybrid Probe Platform

IP.com Disclosure Number: IPCOM000080730D
Original Publication Date: 1974-Feb-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Watson, RH: AUTHOR

Abstract

During the design, development and testing of monolithic memory chips, it becomes necessary to list specific devices in the array while maintaining power in the chip. The hybrid probe platform described integrates a micromanipulator probe head, a high power microscope, a probe card, and the automatic stepping of the probes for testing of integrated circuit function.

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Hybrid Probe Platform

During the design, development and testing of monolithic memory chips, it becomes necessary to list specific devices in the array while maintaining power in the chip. The hybrid probe platform described integrates a micromanipulator probe head, a high power microscope, a probe card, and the automatic stepping of the probes for testing of integrated circuit function.

A micromanipulator 10 has a stage 11 which has three-dimensional movement and on which an integrated circuit wafer 12 may be attached. A tower assembly 13 fitted with a rack and pinion arrangement has attached thereto a probe platform 17. This probe platform 17 is provided with a mount 15 adapted to couple to the rack and pinion arrangement of tower 13. On one corner of the platform 17 there is mounted on a micropositioner 18, a microscope 19. Microprobes 20 can be mounted on the platform and a probe card 21 is positioned at a cutout of the platform 17 and over the stage 11.

In performing the test, the wafer 12 is held on the stage 11 by a suitable vacuum arrangement and the rack and pinion drive on the tower 13 is activated, to bring the probe card 21 into contact with the wafer 12. The microscope 19, having a power between 100 and 200 magnification, must be in close proximity to the card 21 and is focused on the tips of the probes of the card. Thus the card, the microscope and any additional probe 20 can be handled as one unit by use of this stage.

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