Browse Prior Art Database

Inflatable Diaphragm Pad Height Detector

IP.com Disclosure Number: IPCOM000080731D
Original Publication Date: 1974-Feb-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Harris, MJ: AUTHOR [+3]

Abstract

The detection of short or missing contact pads on integrated semiconductor chips can be accomplished by an inflatable diaphragm.

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Inflatable Diaphragm Pad Height Detector

The detection of short or missing contact pads on integrated semiconductor chips can be accomplished by an inflatable diaphragm.

A flanged pressure chamber 10 contains a fluid 12 for actuating and deflecting a contactor 14 affixed thereto. This contactor 14 is made up of a dielectric membrane 16 tightly stretched over the chamber 10. On the top surface of the membrane 16 there is formed by printed-circuit techniques, a plurality of flexible conductive lines 18. There is provided one line for each pad on the chip 20. Each line 18 terminates in a patterned pad contactor, to maximize positive contact and deflection of each line with its corresponding pad. Preferably, a forked pattern is used as the pad contactor.

The amount of deflection in the membrane 16 is a controllable factor determined by the flexibility of the diaphragm material, thickness and geometry of the conductive backing, fluid pressure and the conductive line material thickness and geometry. The described contactor can be cheaply made and has a long, useful life.

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