Browse Prior Art Database

Wafer Stop

IP.com Disclosure Number: IPCOM000080780D
Original Publication Date: 1974-Feb-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 24K

Publishing Venue

IBM

Related People

Mack, A: AUTHOR [+2]

Abstract

This is a technique for eliminating impact shock of semiconductor wafers hitting a fixed stop when traveling on an air cushion.

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Wafer Stop

This is a technique for eliminating impact shock of semiconductor wafers hitting a fixed stop when traveling on an air cushion.

It is known to transport a semiconductor wafer 10 in accordance with the Bernoulli principle, by providing a flow of air through nozzles 12, 14, 16 and 18. Assuming a direction of travel of semiconductor wafer 10 as shown by the arrow, it is desirable to eventually stop this direction of travel without causing edge damage to the wafer 10. Accordingly, stop block 20 is mounted within an air bearing 22 at an angle A. As wafer 10 strikes the resilient energy absorbing material 24 of stop block 20, the inertia of the traveling wafer is expended by lifting stop block 20.

The braking of the semiconductor wafer 10 is at a constant force equal to the product of the weight of the stop block 20 times the sine of angle A. After the wafer 10 is stopped, the same constant force tends to return the wafer and the stop block 20 to their original home position, as shown in the drawing. The same stopping technique is applicable to a wafer transported along the top of an air bearing surface.

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