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Nonclogging Diffusion Source System

IP.com Disclosure Number: IPCOM000080953D
Original Publication Date: 1974-Mar-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Carballo, RA: AUTHOR [+2]

Abstract

A continuous flow of diffusion source gases such as BBr(3), POCl(3) and SiCl(4) without clogging, is maintained by a system which employes an auxiliary flow of inert gas to keep the exhaust tube open.

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Nonclogging Diffusion Source System

A continuous flow of diffusion source gases such as BBr(3), POCl(3) and SiCl(4) without clogging, is maintained by a system which employes an auxiliary flow of inert gas to keep the exhaust tube open.

As shown in the figure, a container 1 of liquid BBr(3) 2 has an automatic refill and constant liquid level system 3. Nitrogen or argon carrier gas under pressure is bubbled into liquid 2 through tube 4, and the carrier gas BBr(3) mixture is fed either to the diffusion process or to forced suction exhaust duct 5 by the positioning of valve 6. Normally, exhaust tube 7 would become clogged at outlet 8 by the formation of solid B(2)O(3). An accumulation of B(2)O(3) is avoided by the use of a tube 9 which is concentric with exhaust tube 7, through which a flow of gas such as nitrogen or argon is maintained. The inert gas curtain isolates the BBr(3) from air, thereby avoiding B(2)O(3) formation at the outlet end.

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