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Detecting Polysilicon on Si(3)N(4) Surfaces

IP.com Disclosure Number: IPCOM000080981D
Original Publication Date: 1974-Mar-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Hoffmeister, W: AUTHOR

Abstract

Cu is absorbed on polysilicon but not on Si(3)N(4), so that even minute traces of polysilicon on Si(3)N(4) surfaces can be detected by autoradiography, after the Si(3)N(4) surfaces have been wetted with a solution containing Cu-64 and subsequently rinsed with water and dried.

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Detecting Polysilicon on Si(3)N(4) Surfaces

Cu is absorbed on polysilicon but not on Si(3)N(4), so that even minute traces of polysilicon on Si(3)N(4) surfaces can be detected by autoradiography, after the Si(3)N(4) surfaces have been wetted with a solution containing Cu-64 and subsequently rinsed with water and dried.

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