Browse Prior Art Database

Wafer Handler Assembly

IP.com Disclosure Number: IPCOM000081005D
Original Publication Date: 1974-Mar-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 63K

Publishing Venue

IBM

Related People

Vokali, AG: AUTHOR

Abstract

An air driven device in combination with a Bernoulli head is utilized to pick up wafers 1 at one point, transport and drop them off at another point.

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Wafer Handler Assembly

An air driven device in combination with a Bernoulli head is utilized to pick up wafers 1 at one point, transport and drop them off at another point.

The movement of the arm 2 is controlled in the rotary direction by a double- shafted air cylinder 3. The ends of the shaft are securely fastened. A rack gear 4 is attached to the body of the cylinder 3 which mates with a spur gear 5 on the working shaft 6. The lateral motion of the cylinder 3, in either direction governs the rotary motion of the working shaft 6 to any degree required. An adjustable stop 7 is located at each end of the shaft. Vertically the arm 2 is controlled by a cam follower 9 which rides on a variable ramp 10. The virtual motion is applied to the arm through a square bearing 8.

The speed of the arm 2 is also adjustable in accordance with the supplied air pressure.

This air driven device has a very smooth operation and a uniform speed from start to finish of the cycle. No electrical wiring is necessary on the unit.

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