Browse Prior Art Database

Wafer Handler Assembly

IP.com Disclosure Number: IPCOM000081006D
Original Publication Date: 1974-Mar-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Vokali, AG: AUTHOR

Abstract

This mechanism was designed to transport wafers from one point to another, utilizing a Bernoulli head in combination with a bidirectional index device and a bidirectional drive motor.

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Wafer Handler Assembly

This mechanism was designed to transport wafers from one point to another, utilizing a Bernoulli head in combination with a bidirectional index device and a bidirectional drive motor.

The arm 3 to which the Bernoulli head 2 is attached picks up the wafer 1 at point "A", transports and deposits it to point "B" in an arc, the angle of which may be variable depending upon the indexer. The index device 5 governs the angle of movement of the arm 3 and wafer 1, which is driven by the bidirectional drive motor 6.

The unique feature of this design is the transferring of the bi-directional rotary motion to any predetermined vertical position of the arm 3 through the cam follower 9 and the circular ramp 8. The ramp 8 controls the rise and fall of the arm 3 and may be any configuration depending upon requirements. The square bearing and shaft 4 controls the accuracy of the movement of the arm in the circular direction with zero backlash. The compression spring 7 provides slight tension at the arm 3 and the cam follower 9, to eliminate bounce while traveling around the ramp 8.

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