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Fabricating an Ink Jet Nozzle

IP.com Disclosure Number: IPCOM000081052D
Original Publication Date: 1974-Mar-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Lane, R: AUTHOR

Abstract

The difficulty of fabricating under one mil openings with a thin wall one to two mils thick and supporting this thin-walled wafer to support, in turn, the fluid pressures required in ink jet printing is well known in the ink jet art. A method for overcoming these difficulties is illustrated in Figs. 1A and 1B.

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Fabricating an Ink Jet Nozzle

The difficulty of fabricating under one mil openings with a thin wall one to two mils thick and supporting this thin-walled wafer to support, in turn, the fluid pressures required in ink jet printing is well known in the ink jet art. A method for overcoming these difficulties is illustrated in Figs. 1A and 1B.

Using an electron beam or laser, first drill the small nozzle jets 12 (one mil or less in diameter) in the nozzle wafer 10. Then drill three or more reference holes 14 ten mils or larger. Next drill the larger holes 18 (approximately three times the diameter of the jet nozzles 12) in the support wafer 16. Then drill the reference holes 20 in the same position as reference holes 14 are drilled in nozzle wafer 10. This assures correct alignment of the two wafers. The two wafers are then lapped and polished. They are laminated together using pins in the reference holes for alignment. The nozzle wafer is then lapped and polished to the required thickness.

When drilling small holes in wafers at the exit face, that is, the face away from the beam having the roundest and smallest hole, by fabricating as above, the best face of each wafer can be selected for the interface lamination. The lamination can be achieved by gold-thermal compression. This has been done in the laboratory, by using the same X-Y stage to drill both wafers. In this way accurate alignment can be achieved. The holes in the support wafer give directional stability to...