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Preparation of Bulk Aluminum Nitride

IP.com Disclosure Number: IPCOM000081071D
Original Publication Date: 1974-Mar-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Molzen, WW: AUTHOR

Abstract

Three major methods are used for the preparation of aluminum nitride. The first involves nitriding the metal directly, which uses high temperatures and pressures for reaction. Often, complete reaction does not occur with the result that a relatively high concentration of aluminum prevails as the major contaminant.

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Preparation of Bulk Aluminum Nitride

Three major methods are used for the preparation of aluminum nitride. The first involves nitriding the metal directly, which uses high temperatures and pressures for reaction. Often, complete reaction does not occur with the result that a relatively high concentration of aluminum prevails as the major contaminant.

The second major method of producing aluminum nitride involves reaction by passing ammonia over molten aluminum in an aluminum-oxide crucible. Thereafter, the product is powdered, and the process is repeated in an attempt to obtain complete reaction. As is evident, this method is quite inefficient. In addition, as in the first method, aluminum is a major contaminant. Moreover, oxide crucible material acts to contaminate the aluminum-nitride product.

The third method of producing aluminum nitride involves decomposing, in several steps, the aluminum chloride ammoniate from the aluminum chloride. The major contaminants now are the chloride used for the source material and the oxide used to obtain the halide.

The present process of preparing bulk aluminum nitride obviates the problems prevalent in the above described processes, particularly as it pertains to contaminants. The process basically utilizes plasma anodization. It has been found that by bombarding a 5/9's pure Marz-grade aluminum target with an RF generated nitrogen plasma at between 500 to 2,000 volts negative bias and at an elevated temperature, bulk aluminum nitride is produced. As the nitrogen bombards the surface of the target in su...