Browse Prior Art Database

Roll Extrusion Filling of Small Vias

IP.com Disclosure Number: IPCOM000081121D
Original Publication Date: 1974-Apr-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Desai, KS: AUTHOR

Abstract

Small vias (less than 5 mils diameter) made in a green ceramic sheet, by for example an E-Beam process, cannot be filled with metallic paste using the standard squeegee process.

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Roll Extrusion Filling of Small Vias

Small vias (less than 5 mils diameter) made in a green ceramic sheet, by for example an E-Beam process, cannot be filled with metallic paste using the standard squeegee process.

The vias can be successfully filled by the following process and as shown in the drawing. The green ceramic sheet is first placed on a MYLAR* sheet which is supported upon a rigid aluminum plate.

A small amount of metallic paste is then placed on the aluminum coated MYLAR mask on the green ceramic sheet. Another MYLAR sheet is placed thereover to prevent paste transfer to the rubber rolls. The composite is then passed through the rubber rolls. The paste is forced to flow uniformly over the entire area of the green ceramic sheet. The extrusion force generated is enough to fill the small vias. The pressure is variable by changing the thickness of the rigid plate. The top MYLAR and aluminum coated MYLAR sheets are then peeled from the green sheet in a single operation. * Trademark of E. I. du Pont de Nemours & Co.

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