Browse Prior Art Database

Fluid Bearing Track Structure

IP.com Disclosure Number: IPCOM000081143D
Original Publication Date: 1974-Apr-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Sacco, HN: AUTHOR

Abstract

Shown is fluid bearing track structure for supporting and transporting articles (such as semiconductor wafers) on a fluid bearing medium.

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Fluid Bearing Track Structure

Shown is fluid bearing track structure for supporting and transporting articles (such as semiconductor wafers) on a fluid bearing medium.

The improvement comprises punched thin steel U-shaped channels 1 with crescent air ports 2. The channels are installed into slats 3 in a track bed 4 containing cavities 5 for fluid communication with the channels. The channels 1 are sufficiently sprung so that on installation to the track bed 4, the spring pressure of the sides of the channel will hold it in place with sufficient force or bias for proper operation under air pressure.

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