Browse Prior Art Database

Soft Glass Etchant

IP.com Disclosure Number: IPCOM000081149D
Original Publication Date: 1974-Apr-01
Included in the Prior Art Database: 2005-Feb-27
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Wirtz, LH: AUTHOR

Abstract

The etching of soft low-temperature dielectric glasses is frequently accomplished by employing aqueous solutions of halogen acids, such as mixtures of perchloric and hydrofluoric acid. These acids also attack the metallurgy and/or substrate material.

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Soft Glass Etchant

The etching of soft low-temperature dielectric glasses is frequently accomplished by employing aqueous solutions of halogen acids, such as mixtures of perchloric and hydrofluoric acid. These acids also attack the metallurgy and/or substrate material.

As depicted in the drawing, chrome, copper, chrome conductors on a glass substrate formed by conventional photolithographic process, are covered with glass dielectric. It is necessary to remove the glass dielectric to provide ohmic contacts. Removal of the glass may also be necessary to expose the substrate for certain bonding and sealing operations.

A dicarboxylic organic acid, such as oxalic acid HO(2)CCO(2)H, may be advantageously employed as an etchant.

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