Original Publication Date: 1974-Jun-01
Included in the Prior Art Database: 2005-Feb-28
AbstractShown is a wafer chuck on which a wafer may be secured, and on which the wafer can be automatically loaded and unloaded with high reliability.
Shown is a wafer chuck on which a wafer may be secured, and on which the wafer can be automatically loaded and unloaded with high reliability.
The chuck comprises a support containing five radial kerfs, or cuts, in which are mounted small pivoting fingers restrained by a formed flat spring. The inner face of the fingers are bevelled to enable the fingers to be cammed open (by a cup disposed about a Bernoulli chuck), whereby the fingers pivot out to increase the effective grasping diameter of the five restraining pins, one on each finger.
As the air on the Bernoulli chuck is tur ed off, the wafer is released to rest on a formed spring stop. As the Bernoulli chuck is removed vertically, the pivot fingers close, to center and hold the wafer on its edge at five positions.