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Chuck Elevator

IP.com Disclosure Number: IPCOM000081469D
Original Publication Date: 1974-Jun-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 73K

Publishing Venue

IBM

Related People

Gustafson, RM: AUTHOR

Abstract

The apparatus comprises a chuck elevator that raises and lowers vacuum chuck 1 with a reduced amount of translational and rotational error. Chuck 1 may be used to support a planar workpiece, such as a semiconductor wafer. Upper cylinder 2 and lower cylinder 3 are fastened together with flexible rolling diaphragm 4 secured between their flanges. Diaphragm 4 is restrained by piston 5 and retainer 6 which are fastened to vertically moving shaft 7. Compression spring 8 urges piston 5 to its down position.

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Chuck Elevator

The apparatus comprises a chuck elevator that raises and lowers vacuum chuck 1 with a reduced amount of translational and rotational error. Chuck 1 may be used to support a planar workpiece, such as a semiconductor wafer. Upper cylinder 2 and lower cylinder 3 are fastened together with flexible rolling diaphragm 4 secured between their flanges. Diaphragm 4 is restrained by piston 5 and retainer 6 which are fastened to vertically moving shaft 7. Compression spring 8 urges piston 5 to its down position.

Upper cylinder 2 houses a split ball bushing 9 which is adjusted for clearance by clamping screw 10 and a slot in the upper cylinder. Bushing 9 is a precision guide for shaft 7. Shaft 7 has a flange 17 for mounting chuck 1 with a push fit at surface 18. 0 ring 11 is used for a vacuum seal.

The lower side of shaft flange 17 is used for mounting pin guide assembly 12. The pin guide assembly is used for rotational adjustment. The pin guide rides between two locking set screws 19 set for minimum clearance. The pin guide is adjusted into parallelism with the main shaft 7 by adjusting two set screws 13. These set screws bear against the lower side of main shaft flange 17 and provide a minor adjustment suitable for bringing the pin guide parallel to the main shaft 7.

Upper cylinder 2 has a threaded ring 14 clamped in place. This ring and adjustment ring 15 serve as an adjustment for the down position of chuck 1. Flange 20 of shaft 7 stops against adjustment ...