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Debris Deflector and Collector

IP.com Disclosure Number: IPCOM000081865D
Original Publication Date: 1974-Aug-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Koste, WW: AUTHOR [+2]

Abstract

A deflector is mounted in the thermal electron beam (EB) column to direct alumina particles evolved from an alumina green sheet by high-energy electrons. A small aperture (0.125") is provided in the center of the deflector to allow the electron beam through to the target sheet below. The deflected particles are gathered in collector containers mounted on the interior sides of the EB column.

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Debris Deflector and Collector

A deflector is mounted in the thermal electron beam (EB) column to direct alumina particles evolved from an alumina green sheet by high-energy electrons. A small aperture (0.125") is provided in the center of the deflector to allow the electron beam through to the target sheet below. The deflected particles are gathered in collector containers mounted on the interior sides of the EB column.

Two different deflector designs are shown in Figs. 1 and 2. The Fig. 1 design uses a hemisphere shaped deflector fitted to direct the particles to a specific quadrant of the column interior. An inverted shaped funnel is used in the Fig. 2 design where space is at a minimum. The particles are deflected around the entire four quadrants of the cylindrical column. 80 per cent or more of the particles can be collected rather than be redeposited on the sheet being machined. This will allow the sheet to be processed further (metallized) without elaborate debris removal steps. A low-vapor pressure substance, such as vacuum grease, may be placed in the collector to prevent the particles from being scattered during the venting and roughing cycle.

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