Browse Prior Art Database

Load Lock Isolation Valve

IP.com Disclosure Number: IPCOM000081870D
Original Publication Date: 1974-Aug-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Budo, Y: AUTHOR [+3]

Abstract

In the development of automatic vacuum-process systems, a common problem encountered is isolating a process chamber from the load chamber with a suitable valving mechanism that permits the workpiece and the transfer mechanism to pass from one chamber to another.

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Load Lock Isolation Valve

In the development of automatic vacuum-process systems, a common problem encountered is isolating a process chamber from the load chamber with a suitable valving mechanism that permits the workpiece and the transfer mechanism to pass from one chamber to another.

This valve is particularly adapted to provide an opening between a load-lock box 10 and a process chamber 12. The valve consists of a wedge element 14 provided with an O-ring 15 on the front surface 16 thereof, which valve is slideably movable in chamber 18. In the closed position, O-ring 15 abuts surface 20 forming a seal over aperture 22. The valve is actuated by a suitable cylinder
24. In operation, wafer 26 can be moved from the load box 10 to processing chamber 12 by a suitable elevator mechanism that passes through aperture 22.

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