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High Tolerance Control of Diameter of Electron Beam Drilled Holes in Quartz for Ink Jet Nozzles

IP.com Disclosure Number: IPCOM000081901D
Original Publication Date: 1974-Aug-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Kuhn, L: AUTHOR [+2]

Abstract

When quartz is drilled with an electron beam, the material around the drilled holes appears to be changed from that of the bulk material. This is believed to be due to either radiation or thermal effects of the high-energy electron beam.

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High Tolerance Control of Diameter of Electron Beam Drilled Holes in Quartz for Ink Jet Nozzles

When quartz is drilled with an electron beam, the material around the drilled holes appears to be changed from that of the bulk material. This is believed to be due to either radiation or thermal effects of the high-energy electron beam.

Using electron-beam (EB) drilling methods, a hole 10 having the configuration shown in Fig. 1 was formed in a quartz substrate 14. The stepped portion 12 is formed as a result of preferential etching of quartz in an HF solution. The preferential etch rate occurs as a result of the heating and subsequent recrystallization of the quartz, due to the EB drilling.

It has been found that the changed area due to the drilling extends much farther than expected. See the dotted line 16 of Fig. 2. It has been discovered that this feature of the drilling process can be utilized to control the diameter of the hole 10. Experiments have established this fact. A 10 mil thick quartz wafer 14 which had been drilled by the electron beam and HF etched for three minutes was etched for two minutes more in HF in 0.5 min increments.

The diameter of the holes was measured after each etch. The hole diameter ranged from 56 to 58 mu after the first three minute etch. After the next two minutes of HF etching they ranged from 64 to 66 mu. From this data the rate of change of the diameter of the holes is as 5.2 mu/min. The outside edge of the step 12 increased at a slower rate than the diameter of the hole 10. This would indicate that the outer...