Browse Prior Art Database

High Temperature Vacuum Evaporation Boat

IP.com Disclosure Number: IPCOM000082080D
Original Publication Date: 1974-Oct-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Hill, PW: AUTHOR

Abstract

A boat-type container provides a source of vacuum deposited film of a homogeneous composition of the source materials. Because vacuum evaporated material deposition is a function of vapor pressure, alloy materials tend to deposit in different combinations than the alloy source. That is, the deposition tends to be rich in whatever element of the alloy has the lowest vapor pressure at the evaporating melt temperature.

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High Temperature Vacuum Evaporation Boat

A boat-type container provides a source of vacuum deposited film of a homogeneous composition of the source materials. Because vacuum evaporated material deposition is a function of vapor pressure, alloy materials tend to deposit in different combinations than the alloy source. That is, the deposition tends to be rich in whatever element of the alloy has the lowest vapor pressure at the evaporating melt temperature.

The vacuum deposition boat 10 is formed of a thin-walled extruded tube, with charge 11 of the alloy material to be deposited being placed within this tube, as shown in Fig. 1. A series of small apertures 12 are placed on one side of the tube and the ends are sealed such as by crimping, as shown in Fig. 2. In a vacuum ambient, a high-energy source is coupled between terminals 15 and 16 so that the alloy becomes a liquid melt 18, as shown in Fig. 3.

The apparatus provides a vapor source of relatively homogeneous composition of the material 11 to be evaporated, when the source alloy material is brought to a boiling temperature. This is because the interior of boat 10 saturates with vapor before it can escape from the small apertures 12 for deposition, such as on a substrate which would also be enclosed in the vacuum deposition system.

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