Browse Prior Art Database

Wafer Holder to Simultaneously Treat Horizontally Positioned Wafers

IP.com Disclosure Number: IPCOM000082172D
Original Publication Date: 1974-Oct-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Krogmann, G: AUTHOR [+2]

Abstract

By utilizing the wafer holder shown in a top and a side view of the figure, large groups of horizontally positioned wafers can be simultaneously treated, for example, with etchants.

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Wafer Holder to Simultaneously Treat Horizontally Positioned Wafers

By utilizing the wafer holder shown in a top and a side view of the figure, large groups of horizontally positioned wafers can be simultaneously treated, for example, with etchants.

The wafer holder consists of two parts 1 and 7. Part 1 consists of a vertical rod 6 with a ring at its upper end to facilitate handling. Part 1 allows the stacking of four columns of wafers 5 symmetrically around rod 6, whereas the wafers in the columns are each arranged at fixed distances from each other. To accomplish this, brackets 2 and 3, each equipped with slots 4, are attached to and arranged, respectively, around rod 6 in such a manner that for each wafer 5 three slots 4 are available to hold it in a stable position at three points at its periphery. Also, that loading and unloading of the wafers 5 can be effected by moving them toward and away from the rod 6, respectively.

Part 7 is arranged concentrically to part 1 and can be rotated with respect to part 1 around rod 6 serving as a rotational axis. Part 7 has the form of a wheel whose hub 10 lies on a plane other than its rim 12. This is possible, since rim 12 is connected by four vertical rods 11 to four spokes 9 extending horizontally from hub 10. Reinforcements 8 interconnect spokes 9.

By the use of two U-bends 13 and 14, superimposed on part 1, part 7 can be kept in 8 stable positions in relation to part 1. Four of these positions are always equivalent. I...