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Deposition of Small Particles on Surfaces Using Magnetic Ink Jet Satellites

IP.com Disclosure Number: IPCOM000082232D
Original Publication Date: 1974-Oct-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Mitchell, JW: AUTHOR [+3]

Abstract

An ink jet stream 2 is provided by an ink jet source, not shown, which stream is passed through a piezoelectric droplet generator 4 for determining the frequency of perturbation of the ink jet stream. Alternatively, a magnetic drop generator could be used in place of the piezoelectric droplet generator.

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Deposition of Small Particles on Surfaces Using Magnetic Ink Jet Satellites

An ink jet stream 2 is provided by an ink jet source, not shown, which stream is passed through a piezoelectric droplet generator 4 for determining the frequency of perturbation of the ink jet stream. Alternatively, a magnetic drop generator could be used in place of the piezoelectric droplet generator.

The ink jet stream is broken up into satellite drops 6 and main drops 8 which are passed through a magnetic selector 10, for separating the satellite drop stream from the main drop stream. The main drop stream is then caught in a catcher assembly 12 and passed by a hose 14 to a reservoir, not shown. The satellite drops 6 are deposited on a silicon wafer 16.

The ink spots formed on the silicon wafer 16 are solidly adhered to the wafer by warming it in air at 70 Degrees C.

By changing the nozzle size and the frequency, spots varying between 1 to 100 Mu can be achieved and accurately positioned on the wafer 16. This method is specifically suited to magnetic spots being applied to surfaces.

Fig. 2 illustrates a piezoelectric droplet generator 18 which provides an ink jet stream 20 from an ink source, not shown, which stream is formed into satellite droplets 22 and main droplets 24. The main droplets 24 pass along the surface of a TEFLON* roller 26 and are deposited in a catcher assembly 28, and pass through a hose 30 to an ink reservoir, not shown. The satellite droplets 22 in the satellite in...