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Electron Gun for Generating X Rays

IP.com Disclosure Number: IPCOM000082388D
Original Publication Date: 1974-Nov-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 52K

Publishing Venue

IBM

Related People

Heritage, MB: AUTHOR [+4]

Abstract

This electron gun is designed to provide a small diameter, high-intensity source of X-rays suitable for fabricating microcircuits in the sub-micron range, by proximity printing through a mask.

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Electron Gun for Generating X Rays

This electron gun is designed to provide a small diameter, high-intensity source of X-rays suitable for fabricating microcircuits in the sub-micron range, by proximity printing through a mask.

All electrodes shown in the sketch, except the target wheel, are rotationally symmetrical about the gun axis. The ring cathode is heated and emits electrons which are focused by the Wehnelt electrode. Simultaneously, the electrons are attracted towards the accelerator electrode, where they pass through the aperture (shown sectionalized) and are subjected to the transverse field produced by the deflector electrode. Because of the rotational symmetry of the electrodes, the electron beam converges on the target wheel in a hollow cone whose apex is at the wheel. The shield electrode preserves and enhances the rotational symmetry of the field.

When the beam is properly focused, none of the electrodes hit the shield electrode. The target electrode is water cooled and rotates for efficient heat dissipation. The X-rays generated by the beam are naturally emitted in all directions, but are truncated by the deflector electrode, thus forming a conical beam symmetrical to the gun axis.

The relative potentials of the electrodes are substantially as labelled on the sketch.

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