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Browse Prior Art Database

Modular Vacuum System

IP.com Disclosure Number: IPCOM000082607D
Original Publication Date: 1975-Jan-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Budo, Y: AUTHOR [+5]

Abstract

Shown is a modular vacuum system that is designed to handle one or more wafer processes as a single unit; thereby eliminating such problems as handling, cleaning, storing, and placing protective coatings between the processes.

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Modular Vacuum System

Shown is a modular vacuum system that is designed to handle one or more wafer processes as a single unit; thereby eliminating such problems as handling, cleaning, storing, and placing protective coatings between the processes.

The modular vacuum system consists of a tunnel section 2, flapper valve 4, floating shuttle 6, coupling 8, rotary linear vacuum feedthrough 10, and lead magazine or copper or gold dispenser 12.

The tunnel section 2 is a rectangular box, which is the process chamber and principal structural unit of the vacuum system. All of the other components are attached to the tunnel section 2.

The flapper valve 4 is a pivoting valve that is the interface between the tunnel sections 2. It provides an atmospheric seal between the load and unload system modules.

The floating shuttle 6 consists of several drive gears with opposing wheels, which support, drive, and position the product through the tunnel sections 2. The floating shuttle 6 also prevents the flapper valves 4 from interfering with the product, as the product travels through the system.

The coupling 8 consists of two pieces; a female on the product handles and a male on the rotary linear vacuum feedthrough 10. The coupling 8 engages the moving product, picks it up, keys it, and rotates it.

The rotary linear vacuum feedthrough 10 has variable speeds with an adjustable linear movement, which can pick up, rotate, and orient the product within the vacuum.

The lead magazine 12 c...