Browse Prior Art Database

Hydraulic XY Theta Stage Movement

IP.com Disclosure Number: IPCOM000082626D
Original Publication Date: 1975-Jan-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 3 page(s) / 82K

Publishing Venue

IBM

Related People

Appenzeller, HA: AUTHOR [+2]

Abstract

This hydraulic X-Y-theta stage movement system includes a two-axis joy stick and a single-axis joy stick for operator control, with ultraprecise proportional metering valves, slave cylinders, and a fluid supply system.

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Hydraulic XY Theta Stage Movement

This hydraulic X-Y-theta stage movement system includes a two-axis joy stick and a single-axis joy stick for operator control, with ultraprecise proportional metering valves, slave cylinders, and a fluid supply system.

Fig. 1 is a schematic view of the system illustrating the operation of the system with respect to one axis. Air under pressure from supply 1 through regulator 2 is applied to fluid 3 in tank 4, forcing fluid 3 to valve V1. When handle 5 of joy stick 6 is moved in the forward direction, it engages cam drive pin 8 and turns cam 9.

Cam 9 is shaped so that it raises lever 7 about pivot 10 raising rounded projection 11 of lever 7, to permit fluid 3 to pass through pinched portion 12 of tube 13. Fluid 3 flows to cylinder 15 and pushes piston 14 in cylinder 15 forward. Releasing joy stick handle 5 causes hold-down spring 16 to lower lever 7 until projection 11 squeezes tube 13 shut, stopping the movement of piston 14.

To retract piston 14, joy stick handle 5 is moved in the reverse direction to open tube 17 by operating valve V2, which is of a similar construction to valve V1. This allows fluid 3 to flow back into return tank 18. Sensor 19 activates pump 20 to maintain the proper fluid level in tanks 4 and 18.

Fig. 2 is a plan view of the X-Y-theta system and includes a two-axis joy stick 21 which actuates stage 22. Left pivot 23 of stage 22 is moved by X cylinder 24 and Y cylinder 25. Two-axis joy stick 21 is actuated by...