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Bidirectional Air Conveyor for a Manual Input Output Transport Conveyor

IP.com Disclosure Number: IPCOM000082646D
Original Publication Date: 1975-Jan-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Noteware, RT: AUTHOR [+2]

Abstract

Shown is a bidirectional air conveyor 4, that is 0.0004 inch formed stainless steel with seven rows of louvers. Four louver rows 6 face towards the center for centering the wafer, plus there are two "out" louver rows 8, which straddle one "in" louver row 10. Two separate air circuits are required.

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Bidirectional Air Conveyor for a Manual Input Output Transport Conveyor

Shown is a bidirectional air conveyor 4, that is 0.0004 inch formed stainless steel with seven rows of louvers. Four louver rows 6 face towards the center for centering the wafer, plus there are two "out" louver rows 8, which straddle one "in" louver row 10. Two separate air circuits are required.

When the wafer moves in, air is applied to the four centering louver rows 6 and the one "in" louver row 10 at two inch water pressure.

In order to move the wafer out, the centering air and "in" air remain on at two inch water pressure, but four inch water pressure is also applied to the two "out" air louver rows 8. Since the "out" air pressure is greater than the "in" air pressure, the wafer moves out.

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