Browse Prior Art Database

Fluid Pressure Lapping Fixture

IP.com Disclosure Number: IPCOM000082693D
Original Publication Date: 1975-Jan-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Nier, HM: AUTHOR

Abstract

A uniform pressure is applied to a substrate 1 for precision lapping by a fluid actuated diaphragm 2 held in a lapping puck 3, as shown in Fig. 1. Lapping pads 4 keep the lapping puck 3 at a uniform distance from the lapping plate. Air is applied to expand the diaphragm 2 via the coupling 5 and an opening 6 formed through the lapping puck 3, see Fig. 2.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Fluid Pressure Lapping Fixture

A uniform pressure is applied to a substrate 1 for precision lapping by a fluid actuated diaphragm 2 held in a lapping puck 3, as shown in Fig. 1. Lapping pads 4 keep the lapping puck 3 at a uniform distance from the lapping plate. Air is applied to expand the diaphragm 2 via the coupling 5 and an opening 6 formed through the lapping puck 3, see Fig. 2.

In Fig. 2, a frame 7 seals the diaphragm 2 with the entrapped air to the lapping puck 3. The substrate 1 to be lapped is loosely held in the frame 7. The lapping puck 3 is placed into contact with the lapping plate via the lapping pads 4 and air pressure is applied to expand the diaphragm 2. The diaphragm 2, through the air pressure, exerts an equal and adjustable pressure to the entire back surface of the substrate 1. The evenly applied pressure permits level lapping of the face of the substrate in the lapping process.

Multiple diaphragms can be inserted into a large lapping puck to lap a plurality of substrates at one time. The fluid pressure can be either equally applied to all diaphragms or each can be individually controlled.

1

Page 2 of 2

2

[This page contains 3 pictures or other non-text objects]