Browse Prior Art Database

Wafer Clean Air Drying Apparatus

IP.com Disclosure Number: IPCOM000082946D
Original Publication Date: 1975-Mar-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

Luhrs, FH: AUTHOR [+2]

Abstract

In air drying processed semiconductor wafers, contamination residuals on the wafer can result in device imperfections and device failure after subsequent processing. The sketch illustrates a wafer drying system or apparatus employing "clean air" as the drying medium, to inhibit wafer contamination by dust etc. carried by the air.

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Wafer Clean Air Drying Apparatus

In air drying processed semiconductor wafers, contamination residuals on the wafer can result in device imperfections and device failure after subsequent processing. The sketch illustrates a wafer drying system or apparatus employing "clean air" as the drying medium, to inhibit wafer contamination by dust etc. carried by the air.

In the drawing, the conventional room air supply source is tapped from the air plenum at 10, which normally supplies the air to "HEPA" filters for overall tool contamination and process control. The tapped air line supplies air to a filter 11 which in turn through a check valve 12 fills an air bag capacitor 13.

A pair of lines 14 and 15, connected through restrictors on control valves 14A and 15A to the air bag capacitor 13, lead to left and right air discharge nozzles 16 and 17 disposed in opposite sides of a tank, not shown, in which a wafer 20 is positioned for reciprocation (by a wafer gripper arm) past the nozzles 16 and 17.

With a wafer 20 in the tank, house compressed air (for example, at 40 psig) is supplied through an air solenoid valve 21 to the exterior of the air bag capacitor, effecting a discharge of the clean air in the capacitor 13 to the wafer 20.

The actuation of the capacitor 13 by the house air may be accomplished in a number of ways. For example, the air bag may be disposed in a larger sealed tank to permit pressurizing of the bag capacitor 13, and upon emptying of the bag, by suitabl...