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Precision Specimen Table Positioner

IP.com Disclosure Number: IPCOM000083098D
Original Publication Date: 1975-Mar-01
Included in the Prior Art Database: 2005-Feb-28
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Edwards, NP: AUTHOR [+2]

Abstract

A precision positioning system for a specimen table is described, which includes a very low hysteresis positioner with freedom in x and y tilt, and elevation.

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Precision Specimen Table Positioner

A precision positioning system for a specimen table is described, which includes a very low hysteresis positioner with freedom in x and y tilt, and elevation.

In the system, piezoelectric arms are used to position the specimen table under servo control. Use of piezoelectric springs simplifies the mechanical design of the table with improved precision, because piezo-electric materials can be selected which have very low mechanical hysteresis.

Figs. 1, 2 and 3 illustrate the manner in which the piezoelectric springs 10 suspend the specimen table 12. The electrodes 14 and 16 are placed such that an S-shaped bending moment is produced by the application of an electric field to the support motors.

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