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Scanning Electron Microscope Technique for Measuring Microcircuit Chip Area Voltages in Presence of Signal Sample Nonuniformities

IP.com Disclosure Number: IPCOM000083189D
Original Publication Date: 1975-Apr-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Lukianof, GV: AUTHOR

Abstract

A scanning electron microscope with a voltage-sensitive detector forms part of a system, for precisely measuring voltage values present at operator selected semiconductor microcircuit chip areas, excluding from such voltage values the effects of, for example, topography, materials variations, and contamination.

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Scanning Electron Microscope Technique for Measuring Microcircuit Chip Area Voltages in Presence of Signal Sample Nonuniformities

A scanning electron microscope with a voltage-sensitive detector forms part of a system, for precisely measuring voltage values present at operator selected semiconductor microcircuit chip areas, excluding from such voltage values the effects of, for example, topography, materials variations, and contamination.

The system includes appropriate means for data collection, storage, processing, and display under the control of an operator station. Data collection is accomplished by use of a scanning electron microscope having a voltage- sensitive detector. Selection of the test locations upon the sample chip is performed under operator control through use of a light pen, or other conventional coordinate determining means. Four sets of data are taken in sequence in a typical operation.

The first set of data comprises a measurement of the voltage of a plurality of locations of the chip in the presence of a bias voltage. The second set of data comprises a measurement of voltage at one or more suitable reference locations upon the chip, in the absence of bias a voltage. The third set of data is comprised of a measurement of the voltage at the same locations as measured in set one, but in the absence of a bias voltage. The fourth set of data is, in turn, a measurement of the same reference voltage locations as set two in the absence of a bias vo...