Browse Prior Art Database

Wafer Positioner

IP.com Disclosure Number: IPCOM000083371D
Original Publication Date: 1975-May-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Caccoma, GA: AUTHOR [+2]

Abstract

Shown is a manual or motor driven wafer positioner. Wafer 4 moves onto a wafer chuck 6 from a wafer elevator and is initially stopped by deceleration vacuum 8. When the wafer elevator senses a positive pressure, then it rises. A wafer chuck rotating motor 10 moves the wafer 4 until the wafer is engaged by a gauging pin air cylinder. The wafer chuck rotating motor slip chuck then slips when the wafer 4 is contacted.

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Wafer Positioner

Shown is a manual or motor driven wafer positioner. Wafer 4 moves onto a wafer chuck 6 from a wafer elevator and is initially stopped by deceleration vacuum 8. When the wafer elevator senses a positive pressure, then it rises. A wafer chuck rotating motor 10 moves the wafer 4 until the wafer is engaged by a gauging pin air cylinder. The wafer chuck rotating motor slip chuck then slips when the wafer 4 is contacted.

Clamping motor 12 clamps the wafer when it is in position and is cammed to six position pins 14 and a wafer notch sensor 16. The clamping motor 12 then moves clockwise until the wafer notch is sensed. After a time delay, the clamping motor 12 moves counterclockwise which retracts the six positioner pins 14 and wafer notch detector 4. The wafer 4 is now ready to be retrieved by its parent handler.

The wafer positioner can also be manually operated by engaging the clamping handle 18 and wafer chuck handle 20.

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