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Stepping Motor Actuated Chip Handler

IP.com Disclosure Number: IPCOM000083671D
Original Publication Date: 1975-Jul-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Kenish, JC: AUTHOR [+2]

Abstract

Described is a unique approach to chip handling, testing, and sorting of semiconductor devices that minimizes the transfer functions of each chip.

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Stepping Motor Actuated Chip Handler

Described is a unique approach to chip handling, testing, and sorting of semiconductor devices that minimizes the transfer functions of each chip.

Each chip to be handled is picked up and held by a vacuum probe during test and carried directly to its particular sort, thus avoiding the intermediate transfer mechanisms previously known and used.

Shown in Figs. 1, 2, and 3 is a stepping motor actuated chip handler which comprises a work station plate 10, a stepping motor 11 with a transport arm 12 attached thereto, and two vacuum probes 12a and 12b carried by the transport arm. These probes are provided with independent Z motion. A plurality of work stations 14a, b, c, d, e, and f are shown located at various points around the plate 10, and on a circle concentric with the shaft of the stepping motor 11. Station 14a is a chip pickup station and head 12a is shown in Fig. 1 as positioned over this. Directly below the head, in phantom, is a chip 15a. For illustration, a second chip 15b is shown positioned in the chip pickup station 14a.

The stepping motor 11 is then turned and positioned such that the head 12a carrying the chip 15a is, as shown in Fig. 2, positioned over the test station 14b. At this test station 14b, the chip is presented for electrical test by having the transport head 12a moved down in the Z direction, so that the chip 15a is now placed against the probes carried by the test station 14b.

When the test is complete,...