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Beveling Jig for Bent Probes

IP.com Disclosure Number: IPCOM000083740D
Original Publication Date: 1975-Jul-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 3 page(s) / 55K

Publishing Venue

IBM

Related People

Lyman, JT: AUTHOR

Abstract

An apparatus is described for accurately holding the probes used in a spreading resistance probe, while they are being ground to a proper bevel.

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Beveling Jig for Bent Probes

An apparatus is described for accurately holding the probes used in a spreading resistance probe, while they are being ground to a proper bevel.

The spreading resistance technique has been shown to be an effective measurement tool for characterizing the conductivity of ultrathin layers of doped semiconductor material. Typical spreading resistance probes are described for example in E. E. Gardener, et al, Electrochemical Society Symposia Proceedings, "Measurement Techniques for Thin Films", April 1967.

Spreading resistance probes 1 and 1' are shown in Fig. 1A in a top view and in Fig. 1B in a front view, in an orthogonal projection.

In use, the probes 1 and 1' are, respectively, offset by an angle of approx.10 degrees from a center line 2. Each probe 1 is comprised of a block 3 and a bent probe portion 4. When mounted on the probe assembly, conventional bent probes 4 and 4' have a separation distance 'x' which can be no smaller than approximately 70 microns, without the possibility of inadvertently shorting out through the mechanical tolerance in the position of the probes.

Fig. 2 illustrates the tips 5 and 5' of the bent probes 4 and 4', respectively. It is seen that conventional probe tips are ground into a conical shape, which typically has a radius of curvature for the point of approximately 25 microns.

It has been found that by putting dual facets 6 and 7 on the probe tip 5 of the bent probe 4, as is shown in Fig. 3, the probe tips can be brought as close together as 20 microns without shorting out. The problem of reliably grinding the probes 4 and 4' to get a reproducible beveled facet 6 and 7 is solved by the jig arrangement described herein.

A three view orthogonal proje...