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Force Gauge for Measuring Four Point Probe Pressure

IP.com Disclosure Number: IPCOM000083898D
Original Publication Date: 1975-Aug-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Marshall, NF: AUTHOR [+2]

Abstract

The apparatus depicted may be employed to measure the merit of probes, used in the measurement of sheet resistance of semiconductor material.

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Force Gauge for Measuring Four Point Probe Pressure

The apparatus depicted may be employed to measure the merit of probes, used in the measurement of sheet resistance of semiconductor material.

The pressure gauge is designed specifically to measure the compressive force and probe spacing of a Fells In-Line Four-Point Probe. The force measurements can be sensed for each probe tip as well as the composite total of all four probe tips, by two different sized pedestals resident on a transducer shaft.

The physical force is then converted into an electrical output displayed on a voltmeter. The spacing characteristic is determined by a comparator butted against an X-Y stage, not shown. This enables the user to determine the distance between probes, by measuring the travel increments from tip-to-tip at the geometrical center of each tip.

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