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Scanning Electron Microscope With Discriminator for Secondary Electrons

IP.com Disclosure Number: IPCOM000083940D
Original Publication Date: 1975-Aug-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Lukianoff, GV: AUTHOR

Abstract

A scanning electron microscope is used for displaying the voltages of conductors of a circuit device or other sample, according to the energy of the secondary electrons that are produced by the device when it is scanned by the electron beam of the microscope.

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Scanning Electron Microscope With Discriminator for Secondary Electrons

A scanning electron microscope is used for displaying the voltages of conductors of a circuit device or other sample, according to the energy of the secondary electrons that are produced by the device when it is scanned by the electron beam of the microscope.

Fig. 1 shows an electron discriminator that has four electrodes 2, 3, 4 and 5 that are given voltages, that cause the discriminator to respond only to secondary electrons within a selected energy range. Fig. 2 shows the output of the discriminator as a function of the voltage of the portion of the sample that is being scanned by the electron beam.

For tests of some circuit devices, the range of sample voltages of the characteristic curve is less than the range of voltages which these devices should be tested. In addition, the resolution of the discriminator (the slope of the curve of Fig. 2) is undesirably small for some tests.

The characteristic curve of Fig. 2 can be raised and lowered along the Y axis by adjusting the voltage on the upper electrode 2. The characteristic curve can be moved to the right or left along the X axis by adjusting the voltage on the lower electrode 3. These voltages are controlled during the operation of the scanning electron microscope, to produce a resultant characteristic curve that provides good resolution for a wide range of sample voltages.

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