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Circuit Testing With Scanning Electron Microscope Producing Stripe Inclination

IP.com Disclosure Number: IPCOM000083941D
Original Publication Date: 1975-Aug-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Herman, PA: AUTHOR [+2]

Abstract

A scanning electron microscope sweeps an electron beam across a sample circuit device that has various voltages applied to its electrodes. These voltages influence the energy of secondary electrons that are produced by the test subject.

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Circuit Testing With Scanning Electron Microscope Producing Stripe Inclination

A scanning electron microscope sweeps an electron beam across a sample circuit device that has various voltages applied to its electrodes. These voltages influence the energy of secondary electrons that are produced by the test subject.

The secondary electrons are detected and a corresponding video signal is applied to a television display, where the image of the sample can be seen and areas differing in brightness correspond to differing voltages. A sweep generator provides a signal to synchronize the scanning electron microscope and the display.

When the voltage on the sample is pulsed at a frequency that is higher than the sweep frequency, the image of a conductor 2 is made up of alternate light and dark intervals in each raster line. (The drawing shows a portion of a single conductor; usually an area having a number of conductors is scanned and displayed.)

In the apparatus of the drawing, a pulse generator energizes a selected conductor of the sample with such a sequence of pulses. The pulse generator is connected through an adjustable phase control to be synchronized with the sweep generator.

The phase control causes the pulses from the pulse generator to be delayed by a selected amount in each line of the raster, and this delay causes the stripes in the image of the conductor to be inclined at an angle that depends on the adjustable delay.

Several conductors of the sample can be...