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Control of Interdiffusion Kinetic of Thin Films by Ion Beam Irradiation Prior to Heat Treatment

IP.com Disclosure Number: IPCOM000083995D
Original Publication Date: 1975-Aug-01
Included in the Prior Art Database: 2005-Mar-01
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Baglin, JE: AUTHOR

Abstract

This technique inhibits deterioration of certain device metallizations caused when multiple-layered films interdiffuse, or become detached, during a necessary heat treatment process in the device manufacture (e.g., peeling of Cr-Cu-Cr stripes on gas panels during heating to make a glass seal).

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Control of Interdiffusion Kinetic of Thin Films by Ion Beam Irradiation Prior to Heat Treatment

This technique inhibits deterioration of certain device metallizations caused when multiple-layered films interdiffuse, or become detached, during a necessary heat treatment process in the device manufacture (e.g., peeling of Cr-Cu-Cr stripes on gas panels during heating to make a glass seal).

It has been observed (Baglin et al, Proc. Conf. on Application of Ion Beams to Metals, Albuquerque, Oct. 1973) in the case of multilayered Cr Cu films, that extensive intermixing of Cr and Cu occurs during heat treatments in pure He above 600 degrees C. It has been established that in some of those films, mixing is inhibited by about 50% if the film has been irradiated with approx. 10/16/ He /+/ ions per cm at 2 MeV before heating.

In the Cr-Cu case, the two metals mix upon heating, even though they have negligible solubility. The critical driving force is thought to originate in the large stresses found in the films; both intrinsic stress (as deposited) and thermal stress, resulting from differential expansion upon heating of the two metals and the substrate.

The mixing appears to follow tensile fracture of one film. Whether or not the tensile limit is reached in any given case depends critically on the film thickness, on the temperature of heating, and on the intrinsic stress in the initial films. Even though possibly small, the intrinsic stress can thus be a deciding factor in...