Browse Prior Art Database

Uniform Spray Etcher

IP.com Disclosure Number: IPCOM000084027D
Original Publication Date: 1975-Sep-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Brower, RD: AUTHOR [+4]

Abstract

Many workpieces may be accurately and uniformly etched by relatively and independently rotating both the workpieces and the etchant source.

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Uniform Spray Etcher

Many workpieces may be accurately and uniformly etched by relatively and independently rotating both the workpieces and the etchant source.

Workpieces, mounted by titanium clips on planetary gears, rotate over an independently rotating etchant spray arm. Uniform quantities of etchant reach all parts of each workpiece, because the spray is directed at the workpiece from a large variety of angles. Puddling of the etchant on the workpiece is virtually eliminated.

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