Browse Prior Art Database

X Ray Shield

IP.com Disclosure Number: IPCOM000084058D
Original Publication Date: 1975-Sep-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Lasky, RC: AUTHOR

Abstract

In scanning electron microscope (SEM) X-ray fluorescence analysis, scattered X-rays from the SEM column can cause erroneous analyses, by affecting the X-ray detector.

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X Ray Shield

In scanning electron microscope (SEM) X-ray fluorescence analysis, scattered X-rays from the SEM column can cause erroneous analyses, by affecting the X-ray detector.

Although the scattered X-rays account for something like 1% of the measured signal, in trace analysis this can be critical.

To prevent such adverse effects, a collimating device made of a material which does not fluoresce in the range detectable by the solid state X-ray unit is used. An organic material is best because it is made of H, C, N, O which satisfy this requirement. Acetal polymer was chosen because it is organic, inert and hydrophobic.

Fig. 1 is a side view and Fig. 2 a top view of a collimating shield made of acetal polymer. Fig. 3 is a diagram of the collimating device (shield) in operation.

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