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Defect Data Analysis in Integrated Circuit Manufacturing

IP.com Disclosure Number: IPCOM000084063D
Original Publication Date: 1975-Sep-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Colom, LA: AUTHOR [+3]

Abstract

Conventionally, a photolithographic semiconductor manufacturing process is controlled by visual inspection of the product and go/no-go decisions are made based on the defect density observed. Data analysis is performed to determine if the process is in control based on output defective data and analysis.

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Defect Data Analysis in Integrated Circuit Manufacturing

Conventionally, a photolithographic semiconductor manufacturing process is controlled by visual inspection of the product and go/no-go decisions are made based on the defect density observed. Data analysis is performed to determine if the process is in control based on output defective data and analysis.

The present system utilizes an APL-programmed computer to collect data and to attach relative importance weighting factors to-defect types, in order to calculate the estimated particular job. Impact to final test yields for the system, also compares defect data to allowable specification by structure and product type and feeds back information.

The system is fully automatic and operates on a realtime basis.

It eliminates the decision making process for the operator, which in a multiproduct line becomes cumbersome due to the complexity of specifications.

This system is a computerized self-supporting manufacturing system. The system receives information on a job lot and returns a job inspection decision; that is, PASS, REWORK, SCREEN OUT REJECTS or HOLD for further disposition. The computer also returns detailed instructions if the input parameters are such that special instructions are necessary. The use of this system reduces the need for close engineering line support when operating a complex manufacturing operation, without the need for extensive training of line operators in quality control and other lot...