Browse Prior Art Database

Mobile Optical Microscope

IP.com Disclosure Number: IPCOM000084257D
Original Publication Date: 1975-Oct-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Grunenwald, CF: AUTHOR [+4]

Abstract

This mobile mounted compound microscope, X-Y stage, and environmental chamber is used to inspect product wafers directly on a wafer fabricator. The microscope can magnify up to 800X, while permitting a clean environment, no loss in throughput, and a reduction in floor space and inspection costs.

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Mobile Optical Microscope

This mobile mounted compound microscope, X-Y stage, and environmental chamber is used to inspect product wafers directly on a wafer fabricator. The microscope can magnify up to 800X, while permitting a clean environment, no loss in throughput, and a reduction in floor space and inspection costs.

The unit consists of a tubular steel frame mounted on casters, and on which is mounted a pressurized clean air environmental chamber 2 containing an X-Y wafer stage 4; a microscope and illumination source 6 for manually viewing the wafer surface; an I/O port, not shown, for the admission and emission of wafers 8; air trackage 10 for moving the wafer between the I/O port and the X-Y stage wafer chuck; a program control unit for automatically driving the X-Y stage to any preselected X-Y coordinate; appropriate seals and filters for maintaining the integrity of the environmental chamber, power supplies and controls; and connections for gas, vacuum, and electrical services.

The I/O port uses a toroidal entry seal which is made compatible with single wafer portable carriers, so that wafers can be handled into and out of the system in a clean environment and without exposure to the local ambient. Inspection judgment is manual.

The environmental chamber 2 is pressurized by N2 or air from self-contained filters, and is exhausted through a controlled leakage seal where the frame of the microscope 6 passes through the top of the environmental chamber.

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