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Apparatus Transporting Several Liquids for Producing Epitaxial Multilayer Devices

IP.com Disclosure Number: IPCOM000084323D
Original Publication Date: 1975-Oct-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Dill, P: AUTHOR [+2]

Abstract

An Archimedean screw enclosed in a cylinder with an axis near horizontal transports separate liquid portions between successive threads. The cylinder forms a chamber for growing epitaxial layers on substrates fixed to its inside. During rotation substrates are successively immersed in liquids, e.g., dissolved or molten semiconducting material. The apparatus is operated in an oven for heating to the proper temperature.

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Apparatus Transporting Several Liquids for Producing Epitaxial Multilayer Devices

An Archimedean screw enclosed in a cylinder with an axis near horizontal transports separate liquid portions between successive threads. The cylinder forms a chamber for growing epitaxial layers on substrates fixed to its inside. During rotation substrates are successively immersed in liquids, e.g., dissolved or molten semiconducting material. The apparatus is operated in an oven for heating to the proper temperature.

Screw S is tightly fitted into cylinder O. Central inner tube I is enclosed by the threads of screw S. At both ends ramps E, F connect the space of the inner tube I with the space around it. By appropriate rotation, liquid portions move to the upper end in spaces A through D between O and I. There ramp E lifts liquids to the level of the inner tube I. Due to the inclination of the axis liquids flow back through tube I to the lower end and over lower ramp F into the space around tube
I.

Liquid portions at A now starts again upwards and the cycle is repeated until rotation stops. The sense of rotation and the direction of liquid transport are fixed, unless the inclination of the axis is reversed. Hence the succession of liquids reaching the substrates is periodic and depends on the sense of rotation. Substrates are affixed to the inner surface of cylinder O at any convenient place.

Alternative apparatus is positioned horizontally. Another screw is fitted into the inner t...