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Apparatus Transporting Several Liquids for Producing Epitaxial Multilayer Devices

IP.com Disclosure Number: IPCOM000084324D
Original Publication Date: 1975-Oct-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 3 page(s) / 60K

Publishing Venue

IBM

Related People

Courtens, E: AUTHOR [+3]

Abstract

The rotary cylinder comprises several chambers communicating with each other and containing portions of different liquids. Communicating chambers are arranged such that each liquid moves from one chamber to the next, upon cylinder rotation of one-half revolution. Liquid movement occurs due to the force of gravity. Therefor, either the whole cylinder or individual chambers are inclined by two through ten degrees to horizontal.

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Apparatus Transporting Several Liquids for Producing Epitaxial Multilayer Devices

The rotary cylinder comprises several chambers communicating with each other and containing portions of different liquids. Communicating chambers are arranged such that each liquid moves from one chamber to the next, upon cylinder rotation of one-half revolution. Liquid movement occurs due to the force of gravity. Therefor, either the whole cylinder or individual chambers are inclined by two through ten degrees to horizontal.

From the last chamber in line liquid is transported back to the starting point either by a straight or a wound external channel, or by another row of associated chambers inclined for reverse movement. Substrates are fixed to the inside of one chamber and are immersed successively in different liquids, e.g., dissolved or molten semiconducting material. The apparatus is operated in an oven heating it to the proper temperature for growth of epitaxial layers.

Cylinder 1 in Fig. 1 is subdivided by walls 2 through 7 to form a plurality of chambers. Holes or cutoff wall sections displaced alter natively by 180 degrees, allow stepwise motion of liquids down the slope when the arrangement is tilted as in position A. A straight external tube 8, displaced by 90 degrees and parallel to the axis of rotation, is provided for transporting liquids back to the starting point. The tube 8 connects the last right chamber with the first left.

When the last liquid is trapped in tube 8 after rotation of 90 degrees, the whole arrangement is tilted back around pivot C to position B and liquid flows from tube 8 into the first left chamber. While rotation continues the original tilt is restored and liquids again, without mixing, move to the right one step after each half revolution.

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