Browse Prior Art Database

Portable Airtight Wafer Carrier

IP.com Disclosure Number: IPCOM000084476D
Original Publication Date: 1975-Nov-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 62K

Publishing Venue

IBM

Related People

Buchmann, AH: AUTHOR [+2]

Abstract

This is a portable, airtight, as well as stationary wafer carrier for transporting semiconductor wafers without "jiggle", damage, or danger of fall out, regardless of the carrier position because there are controlled forces on each wafer.

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Portable Airtight Wafer Carrier

This is a portable, airtight, as well as stationary wafer carrier for transporting semiconductor wafers without "jiggle", damage, or danger of fall out, regardless of the carrier position because there are controlled forces on each wafer.

Semiconductor wafers are usually carried in wafer boats, which have a slot for each wafer. These wafers are free to jiggle, crack, chip, or fall out of the carrier. This jiggling of wafers produces silicon particles that are detrimental to maintaining a contamination free environment.

When the carrier is inserted into its parent equipment, which has its own clean environment (enclosure 11), force F5 presses against pusher block 8, which unlocks the carrier through links 9 and 10, opens doors 7, and through pivot 4 releases etched spring 5 and compresses compression spring 6, thereby releasing the wafers for removal into the manufacturing line (see Figs. 1A and 1B). The reverse procedure is used when the carrier is removed from its parent equipment.

Figs. 2A and 2B show the carrier loaded with wafers (50 wafers maximum). The wafers sit on the projection ribs of ledge plates 1, then each wafer receives a predetermined force F1 from both sides because springs 5 force the wafers against back plate 2 with force F2. Each of springs 5 has a twist at its tips, which generates force F1. In this position, compression springs 6 generate a force F4, which is greater than the total force F1 of all springs 5. F...