Browse Prior Art Database

Automated Ellipsometer

IP.com Disclosure Number: IPCOM000084550D
Original Publication Date: 1975-Nov-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Edwards, NP: AUTHOR [+2]

Abstract

Described is an improvement to automated ellipsometers of the type described in U.S. Patent 3,880,524, issued April 29, 1975 to F. H. Dill et al, and assigned to the International Business Machines Corporation.

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Automated Ellipsometer

Described is an improvement to automated ellipsometers of the type described in U.S. Patent 3,880,524, issued April 29, 1975 to F. H. Dill et al, and assigned to the International Business Machines Corporation.

The improvement consists of affixing a randomizer/diffuser, for example opal glass, to the rotating analyzer of the ellipsometer as illustrated the figure. The randomizer/diffuser is affixed in such a manner that the existing light is essentially depolarized.

To further assure that the sensor, which is sensitive to intensity but may have residual sensitivity to polarization, receives only randomly polarized light, a second, stationary randomizer/diffuser is located before the fiber optic bundle which transmits the incident energy to the photodetector.

The described concept of affixing a depolarizer (randomizer/diffuser) to the rotating analyzer is independent of the particular material used as the depolarizer. It has been found that paper may be used, although less accurate than opal glass.

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