Browse Prior Art Database

Scanning Electron Microscope Technique for Testing Circuit Devices

IP.com Disclosure Number: IPCOM000084658D
Original Publication Date: 1975-Dec-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 22K

Publishing Venue

IBM

Related People

Heasley, RL: AUTHOR [+2]

Abstract

A scanning electron microscope is useful in providing a display or a record of small details of a semiconductor chip. Conventionally, a scanning electron microscope provides a view of the upper surface of the chip and the top surfaces of the conductors that are formed in a layer on the chip surface.

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Scanning Electron Microscope Technique for Testing Circuit Devices

A scanning electron microscope is useful in providing a display or a record of small details of a semiconductor chip. Conventionally, a scanning electron microscope provides a view of the upper surface of the chip and the top surfaces of the conductors that are formed in a layer on the chip surface.

In the method that is shown in the drawing, the specimen that is to be tested is tilted at a high angle, so that the edges of the conductors are visible to the scanning electron microscope. A suitable angle is in the range of 65 to 85 degrees. The metal conductors and defects that may occur in these conductors can be more readily observed.

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