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Triple Axis Goniometer for Prealignment and Sawing of Crystals

IP.com Disclosure Number: IPCOM000084741D
Original Publication Date: 1975-Jun-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 75K

Publishing Venue

IBM

Related People

Grandia, J: AUTHOR [+2]

Abstract

A triple-axis goniometer is described which provides a mechanical base, (a) on which a crystal can be accurately aligned by X-ray diffraction, optical devices, etch figures or other means, and (b) which provide support for sawing or lapping operations while maintaining the precise crystal orientation. This device permits accurate crystal orientation, and it provides support for sawing oriented wafers or grinding a crystal face in a specified plane.

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Triple Axis Goniometer for Prealignment and Sawing of Crystals

A triple-axis goniometer is described which provides a mechanical base, (a) on which a crystal can be accurately aligned by X-ray diffraction, optical devices, etch figures or other means, and (b) which provide support for sawing or lapping operations while maintaining the precise crystal orientation. This device permits accurate crystal orientation, and it provides support for sawing oriented wafers or grinding a crystal face in a specified plane.

The goniometer as shown in the figure has a metal plate 1. A crystal, not shown, is cemented to a piece of glass, not shown, which, in turn, is cemented to the surface in the center of plate 1. Plate 1 provides a maximum support for the crystal in any subsequent cutting or lapping operation.

This goniometer has three mutually perpendicular rotational axes to allow all the necessary degrees of freedom required to orient a plane in space; (a) a full- graduated circle 2 in the horizontal plane allows rotation of the crystal around a vertical axis; (b) a half-circle 3 allows rotation of the crystal around a horizontal axis; and (c) a full-graduated circle 4 allows rotation of the crystal around an axis which is perpendicular to 3. Adjustments may be made over large angular ranges.

The base of the goniometer consists of four mutually perpendicular sides 5 which have been carefully machined to serve as reference edges.

There are two general modes of operation: (1...