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Tri Air Lock Handler for use in Testing High Circuit Density Semiconductor Devices

IP.com Disclosure Number: IPCOM000084811D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

Bruder, SI: AUTHOR [+4]

Abstract

This handler facilitates the testing, in a cooling liquid, of substrates populated with integrated circuit devices. Testing of populated substrates may be performed by electrical connection through their pins, and/or by electrical probing of the circuits through their exposed surface metallurgy.

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Tri Air Lock Handler for use in Testing High Circuit Density Semiconductor Devices

This handler facilitates the testing, in a cooling liquid, of substrates populated with integrated circuit devices. Testing of populated substrates may be performed by electrical connection through their pins, and/or by electrical probing of the circuits through their exposed surface metallurgy.

As depicted in the drawing, the tri-air lock handler includes three chambers: load, test and unload. Automatic load/unload devices are used to transport each unit through the test chamber.

A typical operating sequence is as follows: a unit to be tested is loaded into the air filled empty load chamber by the automatic loading device. (The test chamber is always filled with cooling liquid.) The load chamber is sealed and filled to the test chamber's level with cooling liquid. The sealing door between the load chamber and the test chamber is opened and the unit is transferred by the automatic load device into the test chamber. An automatic aligner aligns the unit to the test socket and/or to the probes. Electrical contact is made with the unit and testing begins.

Meanwhile, the automatic loading device has withdrawn to the load chamber and the sealing door between the test and load chambers has closed. The load chamber is then drained and nitrogen purged. The automatic loading device picks up another unit to be tested for placement in the load chamber.

The automatic unload device is in a stand...