Browse Prior Art Database

Toxic Fluid Transport System

IP.com Disclosure Number: IPCOM000084820D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 3 page(s) / 41K

Publishing Venue

IBM

Related People

Kraycir, JR: AUTHOR

Abstract

The use of highly toxic gasses in large quantities is commonplace in the semiconductor industry and the enclosed working environment (and ventilating systems) subjects large numbers of people to the hazard of escaping gas. In order to reduce the hazards of transportation through the building and the removal of leaking gas cylinders, a system of piping from an outside storage system gains appeal.

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Toxic Fluid Transport System

The use of highly toxic gasses in large quantities is commonplace in the semiconductor industry and the enclosed working environment (and ventilating systems) subjects large numbers of people to the hazard of escaping gas. In order to reduce the hazards of transportation through the building and the removal of leaking gas cylinders, a system of piping from an outside storage system gains appeal.

Piping systems are not in themselves trouble free and are as well subject to the risk of leakage, rupture and inadvertent severing. Commonly a double-wall tubing is used to reduce the probability of a leak or rupture, but this in itself is not free from problems. In general, it is not known when a leak in the inner tubing has occurred and such a double-wall system is ineffective in the event of accidental severing of the piping system.

The system shown is devised to circumvent these problems. As shown, the system comprises a double-annular piping system 10 having conditions in the intermediate voids 11, 12 that reduce risk in the event of a total failure, and provides adequate protection and detection in the event of a partial failure.

The system consists of one or more toxic gases distributed through feeder pipes 13 from outside the main building. Each gas cylinder 14 is equipped with flow and pressure regulators and automatic cutoff solenoids, not shown, to reduce the exposure (concentration) in the event of failure. Gases are diluted with carrier gases to the lowest possible concentration usable by the processing equipment.

A material that serves to detoxify the toxic material contained in the inner tube 13 is supplied to the void 12 provided by intermediate tube 12A from a container 17 through tubing 13. The detoxifying material is maintained at such pr...