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Browse Prior Art Database

Liquid Dispense Verification Sensor

IP.com Disclosure Number: IPCOM000084821D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Auerbach, IA: AUTHOR [+3]

Abstract

In closed manufacturing units it is difficult to visibly detect whether a liquid, such as a photoresist, has been dispensed upon an object such as a semiconductor wafer. A simple apparatus for detecting the existence of the dispensing of the liquid onto the object is illustrated in the drawings.

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Liquid Dispense Verification Sensor

In closed manufacturing units it is difficult to visibly detect whether a liquid, such as a photoresist, has been dispensed upon an object such as a semiconductor wafer. A simple apparatus for detecting the existence of the dispensing of the liquid onto the object is illustrated in the drawings.

Referring to the drawings, a plurality of liquid dispense nozzles 10 is illustrated superimposed over a semiconductor wafer or the like 11, the wafer being disposed upon a pedestal 12. An infrared optical sending unit 13 is positioned adjacent the wafer 11 and above its upper surface 11A, for emitting infrared radiation in the path of the liquid to be dispensed.

Aligned with the transmitter or sender 13, and on the opposite side of the pedestal 12 and wafer 11, is a receiving unit 14 which is suitably masked so as to primarily receive the light from the infrared optical sending or transmitting unit 13.

Referring to Fig. 2, when liquid is dispensed, the infrared wave of the sending unit 13 is deflected or broken by the fluid streams 10A emanating from the dispensing nozzles 10. The fluid 10A breaks the infrared wave and permits a signal output to an amplifier 15, which may be suitably connected to a computer or other recording device to indicate that liquid has been dispensed, in the present instance photoresist, onto a semiconductor wafer 11.

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