Browse Prior Art Database

Automatic Glove Washer and Dryer

IP.com Disclosure Number: IPCOM000084822D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Palagonia, AM: AUTHOR [+2]

Abstract

In wet processing stations in semiconductor manufacturing, especially the etching and acid stations, the gloves of the operators tend to pick up acid. Contaminated gloves are dangerous and also can contaminate control fixtures.

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Automatic Glove Washer and Dryer

In wet processing stations in semiconductor manufacturing, especially the etching and acid stations, the gloves of the operators tend to pick up acid. Contaminated gloves are dangerous and also can contaminate control fixtures.

The unit shown in the figure provides for cleaning off the acid at the processing station. The unit automatically sprays deionized water for a predetermined time on the operators gloved hand to rinse off the acid. The glove is the dried with a blast of nitrogen. The unit is initiated automatically when a photocell circuit is interrupted by the insertion of a gloved hand into the unit.

Preferably the unit is disposed under the same hood as the acid with the electronic controls being located behind the hood.

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