Browse Prior Art Database

Test Probe

IP.com Disclosure Number: IPCOM000084827D
Original Publication Date: 1976-Jan-01
Included in the Prior Art Database: 2005-Mar-02
Document File: 2 page(s) / 92K

Publishing Venue

IBM

Related People

Faure, LH: AUTHOR

Abstract

This testing probe contactor, utilizing buckling beam elements, solves the problem of erratic side deflections.

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Test Probe

This testing probe contactor, utilizing buckling beam elements, solves the problem of erratic side deflections.

In the packaging of integrated circuit semiconductor devices, it is normally considered essential to test the substrate supporting the semiconductor to determine the quality of the metallurgy associated with the contacts. The contacts are relatively closely spaced, and there are normally differences in heights of the pads to be contacted.

A form of contactor that has been found desirable utilizes the concept of a buckling beam. In the buckling beam contactor mechanism, a long slender rod- like element supported generally at each end is moved into contact with the pad. Any height variations of pads are taken up by a lateral flexing or bending of the element.

While the buckling beam probe has solved many technical problems, difficulty has been experienced by the forming of electrical contacts between adjacent flexed elements or beams. This frequently produces erratic readings.

In this probe structure, a plurality of buckling beam elements 20 as shown in Fig. 1 is supported at the top and bottom by apertured plate elements 22 and 24. Suitable means for making electrical contact between the individual probe elements 20 and electrical test apparatus is provided, but not shown in the drawing.

As indicated more clearly in Fig. 2, two concentric rows of elements are provided in the probe illustrated to contact a similar arrangement of pads on a subst...